Ventilation method: Suction duct system [Patent No. 3883483]

As a measure to address dust generation sources, it is the optimal ventilation method that meets the guidelines.

最終更新日 Nov 06, 2020

Duct series that is resistant to air leakage

The leakage airflow is almost "zero" for the positive pressure duct "Non-Leak Duct." For negative pressure duct used in high-pressure ventilation systems such as long-distance shields, "Pita Joint Duct."

最終更新日 Nov 06, 2020